Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing
- Creator: Ruppert, Michael G. , Yong, Yuen K.
- Resource Type: journal article
- Date: 2017
Development of a MEMS position transducer using bulk piezoresistivity of suspensions
- Creator: Bazaei, Ali , Maroufi, Mohammad , Mohammadi, Ali , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2014
Self-sensing electrostatic drive in a MEMS nanopositioner for the application of vibration control
- Creator: Moore, Steven I. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2014
Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes
- Creator: Bazaei, Ali , Mohammadi, Ali , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2014